Detection of trace elements by EPMA.
Detection sensitivity is excellent! It is particularly outstanding for quantitative analysis of trace components and map analysis.
EPMA analysis has good energy resolution and detection sensitivity, and is particularly excellent for quantitative analysis of trace components and map analysis. In a case where a defect occurred in the Au-1st bonding within the package, EDX analysis and EPMA analysis were conducted to identify the corrosive substances and confirm their distribution. Since EPMA has superior resolution, detection limits, and P/B (peak to background) ratios compared to EDX, the distribution of trace Cl could be clearly understood. 【Equipment Specifications】 ■ Manufacturer: JEOL Ltd. Jeol-8200 ■ Analysis Method: Wavelength Dispersive X-ray Analysis (WDX) ■ Analyzable Elements: B to U ■ Energy Resolution: 20 eV (EDX is approximately 130 eV) ■ Detection Limit: 0.01% and above ■ Maximum Sample Size: 100×100 mm *For more details, please refer to the PDF document or feel free to contact us.
- Company：アイテス
- Price：Other
